It looks to me like you had a previous version of the driver extracted to C:\ATI
Delete C:\ATI and C:\Swsetup folders.
Then start the process again from beginning to end.
If it extracts to a different folder than C:\ATI, use that folder as a substitution in the process instead.
If you follow well, it will go well.
The other versions of drivers you previously tried are interfering with the correct process.